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HomeHigh-accuracy Positioning Stages

Posts in category: High-accuracy Positioning Stages

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Z Tilt Stages

October 3, 2023
by Mirai Automation High-accuracy Positioning StagesSemiconductors

A tilting stage incorporating three wedge-type Z-axis modules. Place the objects requiring angle adjustment on the stage, the height and horizontal level can be adjusted by vertical movement of each actuator. HEPHAIST spherical rolling joints (SRJs) are used for the joints between the table and the actuators.

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Ultra-precision Stages

October 3, 2023
by Mirai Automation High-accuracy Positioning StagesSemiconductors

The feed mechanism incorporates a “ball screw + wedge type speed reduction mechanism”. This is a super-precise stage that achieves high follow-up*, high accuracy, and high stiffness by mounting a cross roller guide on the linear motion guide.

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XYθ Stages

October 3, 2023
by Mirai Automation High-accuracy Positioning StagesSemiconductors

Ultra-thin stage with electric actuators placed on the single plane, it makes the center of gravity of the entire equipment lower enough. Various table movements are possible by operating three actuators placed on the single plane individually.

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