High-accuracy Positioning Stages

A tilting stage incorporating three wedge-type Z-axis modules. Place the objects requiring angle adjustment on the stage, the height and horizontal level can be adjusted by vertical movement of each actuator. HEPHAIST spherical rolling joints (SRJs) are used for the joints between the table and the actuators.

The feed mechanism incorporates a “ball screw + wedge type speed reduction mechanism”. This is a super-precise stage that achieves high follow-up*, high accuracy, and high stiffness by mounting a cross roller guide on the linear motion guide.

Ultra-thin stage with electric actuators placed on the single plane, it makes the center of gravity of the entire equipment lower enough. Various table movements are possible by operating three actuators placed on the single plane individually.