Place the objects requiring angle adjustment on the stage, the height and horizontal level can be adjusted by vertical movement of each actuator.
HEPHAIST spherical rolling joints (SRJs) are used for the joints between the table and the actuators.
| Properties | TIL3Z-2004PR | ||
| Z Stroke | Z axis:：±8 mm | ||
| Tilt Stroke | θX/θY ±3° | ||
| Wedge Ratio | １／４ | ||
| Table size | 280×280mm | ||
| Base size | 260×260mm （Motor Protrusion Amount：17mm） | ||
| Height | 188mm (When the Z-axis is at 0 mm) | ||
| Repetitive positioning accuracy | Z axis：±2.0μm θx axis：±6s θy axis：±6s | ||
| Static load capacity *1 (Distributed loading for the vertical equal position) | 500N | ||
| Dynamic load capacity *1 (Distributed loading for the vertical equal position) | 500N | ||
| Stage material | Iron: Low-temperature black chrome treatment Aluminum: black anodized | ||
| Ball screw lead | 1mm | ||
| Stepping motor model | Motor model | ARM26SM0K（With electromagnetic brake） / Product of ORIENTAL MOTOR | |
| Driver model | Stepping：ARD-K / Product of ORIENTAL MOTOR | ||
| Resolution (factory setting) | 0.1μm/pulse | ||
| Servo-motor model | Motor model | HG-AK0236B（With electromagnetic brake） / Product of Mitsubishi Electric | |
| Driver model | Servo：MR-J4-03A6 / Product of Mitsubishi Electric | ||
| Resolution (factory setting) | 0.1μm/pulse | ||
| Photomicrosensor *2 | PM-Ｌ25 / Product of Panasonic Industrial Devices SUNX | ||
| Weight | 22kg | ||
| Lubricant | Low dusting grease | ||
*1 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.