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XYθ Stages

Ultra-thin stage with electric actuators placed on the single plane

  • It makes the center of gravity of the entire equipment lower enough.
  • Various table movements are possible by operating three actuators placed on the single plane individually.

Operating Principle

Driving the U axis moves the table in the X direction

Driving the V and W axes the same amount in the same direction moves the table in the Y direction

Driving the V and W axes the same amount in the same direction while driving the U axis moves the table diagonally

Example of rotating the table using the table center as the axis of rotation (θ axis)

Example of rotating the table using an arbitrary point as the axis of rotation (θ axis).

NAF3series Type-C

NAF3 Series Type-C uses “preloaded double slide structure”, which places an intermediate plate sandwiched between two upper and lower plates for 3-axis actuator (U/V/W) and slide section.

Lots of balls placed between each plate allow smooth planar rolling motion, “Preloaded double slide structure” makes stages thin, compact and highly rigid for highly accurate positioning.

NAF3series Type-D

Type-D does not use “preloaded double slide structure”, Type-D possesses unique advantages with a wide range of motion and a larger central opening.

Applications for NAF3 series

  • semiconductor manufacturing equipment, testing equipment.
  • Panel joining and mounting equipment(LCD, EL, touch panel, solar cell).
  • Printing equipment(Chip components, PCB, FPC).
  • Microscope stage and so forth.

System Configuration Drawing

Product Specifications

NAF3C-10-01P
Properties NAF3C-10-01P
Stroke *1 XY±2mm・Θ±2°
Table size 100mm x 100mm
Base size 120mm x 120mm
Height 35mm
Unidirectional repeatability Within ±1μm
Bidirectional repeatability Within 3μm
Static load capacity *2 (Distributed loading for the vertical equal position) 200N
Dynamic load capacity *2 (Distributed loading for the vertical equal position) 100N
Parallelism 30μm
Stepping motor model PK513PA Product of ORIENTAL MOTOR
Servo-motor model
Ball screw lead 1㎜
Driver model *3 Stepping:MC-S0514-3L / Product of MICROSTEP Co.
Resolution (factory setting) Stepping:0.2μm/pulse / Servo:0.1μm/pulse
Photomicrosensor *4 PM-L25 / Product of Panasonic Industrial Devices SUNX
Stage material Iron: Low-temperature black chrome treatment Aluminum: black anodized
Weight 2.2kg
Lubricant Low dusting grease

*1 It is feasible for each axis to commence its movement simultaneously from the origin position(center of the top table), enabling a full stroke operation, if required.
*2 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*3 The driver for the stepping motor is of an open-loop configuration.
*4 There are 3 photo micro sensors on drive module on each axis.

NAF3C-16K00
Properties NAF3C-16K00 *1
Stroke *2 XY±5mm・Θ±3°
Table size 160mm x 160mm
Base size 170mm x 170mm
Height 45mm
Unidirectional repeatability Within ±0.7μm
Bidirectional repeatability Within 2μm
Static load capacity *3 (Distributed loading for the vertical equal position) 1000N
Dynamic load capacity *3 (Distributed loading for the vertical equal position) 300N
Degree of parallelism 30μm
Stepping motor model TS3664N16E2 Product of TAMAGAWA SEIKI Co.
Servo-motor model HG-AK0236(20W) Product of Mitsubishi Electric Corporation
Ball screw lead 1㎜
Driver model *4 Stepping:MC-S0514-3L / Product of MICRO STEP Servo-amplifier :MR-J4-03A6 Product of Mitsubishi Electric Corporation
Resolution (factory setting) Stepping:0.2μm/pulse / Servo:0.1μm/pulse
Photomicrosensor *5 PM-L25 / Product of Panasonic Industrial Devices SUNX
Stage material Iron: Low Temperature black chrome plating treatment / Aluminum: black anodizing
Weight 6kg
Lubricant Low dusting grease

*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.

NAF3C-20K01
Properties NAF3C-20K01 *1
Stroke *2 XY±5mm・Θ±3°
Table size 200mm×200mm
Base size 220mm x 220mm
Height 65mm
Unidirectional repeatability Within ±1μm
Bidirectional repeatability Within ±2μm
Static load capacity *3 (Distributed loading for the vertical equal position) 2000N
Dynamic load capacity *3 (Distributed loading for the vertical equal position) 600N
Degree of parallelism 30μm
Stepping motor model PK543NAW Product of ORIENTAL MOTOR
Servo-motor model HG-KR053(50W) Product of Mitsubishi Electric Corporation
Ball screw lead 1㎜
Driver model *4 Stepping:MC-S0514-3L / Product of MICRO STEP Servo-amplifier :MR-J4-10A Product of Mitsubishi Electric Corporation
Resolution (factory setting) Stepping:0.2μm/pulse / Servo:0.1μm/pulse
Photomicrosensor *5 PM-L25 / Product of Panasonic Industrial Devices SUNX
Stage material Iron: Low Temperature black chrome plating treatment / Aluminum: black anodizing
Weight 14kg
Lubricant Low dusting grease

*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.

NAF3C-30K00
Properties NAF3C-30K00 *1
Stroke *2 XY±5mm・Θ±3°
Table size 300mm x 300mm
Base size 320mm x 320mm
Height 70mm
Unidirectional repeatability Within ±1μm
Bidirectional repeatability Within ±2μm
Static load capacity *3 (Distributed loading for the vertical equal position) 4000N
Dynamic load capacity *3 (Distributed loading for the vertical equal position) 1000N
Degree of parallelism 30μm
Stepping motor model PK546PA / Product of ORIENTAL MOTOR
Servo-motor model HG-KR053(50W) Product of Mitsubishi Electric Corporation
Ball screw lead 2mm
Driver model *4 Stepping:MC-S0514-3L / Product of MICRO STEP Servo-amplifier:MR-J4-10A / Product of Mitsubishi Electric Corporation
Resolution (factory setting) Stepping:0.2μm/pulse / Servo:0.1μm/pulse
Photomicrosensor *5 PM-L25 / Product of Panasonic Industrial Devices SUNX
Stage material Iron: Low Temperature black chrome plating treatment / Aluminum: black anodizing
Weight 44kg
Lubricant Low dusting grease

*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.

NAF3C-40K00
Properties NAF3C-40K00 *1
Stroke *2 XY±5mm・Θ±3°
Table size 400mm x 400mm
Base size 400mm x 400mm
Height 80mm
Unidirectional repeatability Within ±1μm
Bidirectional repeatability Within ±2μm
Static load capacity *3 (Distributed loading for the vertical equal position) 6000N
Dynamic load capacity *3 (Distributed loading for the vertical equal position) 1000N
Degree of parallelism 30μm
Stepping motor model PK546PA / Product of ORIENTAL MOTOR
Servo-motor model HG-KR053(50W) Product of Mitsubishi Electric Corporation
Ball screw lead 2mm
Driver model *4 Stepping:MC-S0514-NF-3L / Product of MICRO STEP Servo-amplifier:MR-J4-10A / Product of Mitsubishi Electric Corporation
Resolution (factory setting) Stepping:0.2μm/pulse / Servo:0.1μm/pulse
Photomicrosensor *5 PM-L25 / Product of Panasonic Industrial Devices SUNX
Stage material Iron: Low Temperature black chrome plating treatment / Aluminum: black anodizing
Weight 60kg
Lubricant Low dusting grease

*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.

NAF3D-40K02
Properties NAF3D-40K02 *1
Stroke *2 XY±5mm・Θ±3°
Table size 400×400mm  (Center hole:□125)
Base size 400×400mm  (Center hole:□125)
Height 85.4mm
Unidirectional repeatability Within ±1μm
Bidirectional repeatability -
Static load capacity *3 (Distributed loading for the vertical equal position) 6000N
Dynamic load capacity *3 (Distributed loading for the vertical equal position) 1000N
Degree of parallelism 50μm (measured on each axis)
Stage material Iron:Low Temperature black chrome plating treatment / Aluminium:black anodizing
Ball screw lead 1mm
Stepping motor model Motor model PKP546N18A / Product of ORIENTAL MOTOR
Driver model *4 MC-S0514-3L / Product of MICRO STEP
Resolution (factory setting) 0.2μm/pulse
Servo-motor model Motor model HG-KR053 / Product of Mitsubishi Electric Corporation
Driver model MR-J4-10A / Product of Mitsubishi Electric Corporation
Resolution (factory setting) 0.1μm/pulse
Photomicrosensor *5 PM-L25 / Product of Panasonic Industrial Devices SUNX
Weight 45kg
Lubricant Low dusting grease

*1 Please choose either stepping motor (type-P) or servo motor (type-S).
*2 It is possible for each axis to be in full stroke at its starting point (at the center of the top table).
*3 This is the capacity for a vertically evenly distributed load. To be loaded on to conveyance stage or other cases, the number above will not apply.
*4 The driver for the stepping motor is in open corrector specification.
*5 There are 3 photo micro sensors on drive module on each axis.

Model number notation

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