Semiconductors

The essential multi-degree-of-freedom joints for parallel mechanisms have conventionally been obtained 2 to 3 degrees of freedom with combinations of spherical joints. However, such spherical joints combinations often lead to structural complexity and bulkiness. There are multi-degree-of-freedom sliding spherical ball bearings available, but they come with large frictional resistance and internal clearance issues. Hephaist has developed SRJ - Spherical Rolling Joints as the solutions to all these issues.

There are 2 types of linear bearing: Finite Linear Motion Type – limited stroke type, and Infinite Circular Type – unlimited stroke type. Linear motion using the rolling motion of balls. With the rolling grooves on the shaft and outer cylinder, it can handle both radial loads and rotational torque. It is ideal for mechanisms that execute linear movements while transmitting torque, and is used in a wide range of fields including transfer equipment and robots.

Ultra-thin stage with electric actuators placed on the single plane, it makes the center of gravity of the entire equipment lower enough. Various table movements are possible by operating three actuators placed on the single plane individually.

The feed mechanism incorporates a “ball screw + wedge type speed reduction mechanism”. This is a super-precise stage that achieves high follow-up*, high accuracy, and high stiffness by mounting a cross roller guide on the linear motion guide.

A tilting stage incorporating three wedge-type Z-axis modules. Place the objects requiring angle adjustment on the stage, the height and horizontal level can be adjusted by vertical movement of each actuator. HEPHAIST spherical rolling joints (SRJs) are used for the joints between the table and the actuators.